Atom pinhole camera for nanolithography from the Institute of Spectroscopy, Russian Academy of Sciences
Scientists from the Institute of Spectroscopy, Russian Academy of Sciences have developed a method of nanofabrication using an atom pinhole camera. For the first time, the researchers, along with coauthors from the Moscow Institute of Physics and Technology, have experimentally demonstrated how to use the camera obscura to manufacture an array of identical atomic nanostructures of controlled shapes and sizes. The technique could produce individual nanostructures down to 30 nm, a size reduction of 10,000 times compared with the original object.
As the scientists explain, the atom pinhole camera they designed is based on the idea of an optical pinhole camera, which is often used in optics when creation of a focusing lens is difficult. Instead of light traveling through a lens, light travels through a pinhole on a mask, and creates an inverted image on a substrate on the other side. Optical pinhole cameras can produce high-quality images with high resolution that depends on the diameter of the pinhole.
In an atom pinhole camera, atoms pass through pinholes in a mask and generate a scaled-down nanostructure of the mask’s pattern onto a substrate. (Credit: sci publication)
In an atom pinhole camera, atoms act like photons in an optical pinhole camera, and so the main principles are the same in both versions. In their experimental setup, the scientists used ion beam milling to poke a pinhole in a mask. After the atoms passed through the pinhole, they created an atomic nanostructure on a silicon substrate. As the atom pinhole camera provides a way to replicate micro-sized objects as nano-sized ones, the camera is an example of Feynman’s scalable manufacturing system.
The scientists also created another mask with a large array of pinholes. In this “atom multiple pinhole camera,” each pinhole could generate its own image, which does not intersect with neighboring images. As the scientists noted, a camera with up to 10 million pinholes could open up opportunities for simultaneous generation of large numbers of identical (or diverse) nanostructures.
Masks with large arrays of pinholes (Credit: sci publication)
Using an atom pinhole camera to fabricate nanostructures offers several advantages compared to other nanofabrication techniques, which include optical photolithography (in which a photosensitive material is molded by light), nanolithography (in which focused particle beams mold objects), and atom optics methods that use lenses, which are limited by diffraction.
The atom pinhole camera is a novel type of lens-less atom optics technique, which uses diffraction to its advantage. While it might seem that resolution in atom pinhole camera would be limited to the diameter of the pinhole, the researchers show in an upcoming study that the image spot diameter can be three times smaller than the pinhole diameter, which is due to diffraction effects.
The new method can be used with a variety of materials for nanostructures (e.g. atoms, molecules, and clusters) and a variety of substrates, which could make it useful for diverse applications such as electronics and biological uses. The scientists predict that the method could have applications in metamaterials, plasmonics, spintronics, MEMS/NEMS, and more.
From scientific publication: P. N. Melentiev et al. Nanolithography based on an atom pinhole camera,– 2009 Nanotechnology 20 235301 (7pp) doi: 10.1088/0957–4484/20/23/235301
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